Microfigure Measuring Instrument SURFCORDER
Model Lineup
ET200
ET200 is able to trace and analyze nano-level micro figures with high accuracy, appropriate for soften sample surfaces by controlling the measuring force.
| Max. sample size | φ160 × t 48 mm |
|---|---|
| Repeatability | 1 σ 1 nm or less |
| Measuring range | Z: 600 μm X: 100 mm |
| Resolution | Z: 0.1 nm X: 0.1 μm |
| Measuring force | 10 μN to 500 μN |
ET4000
Excellent in accuracy, stability and functionality, ET4000 is a fully automatic, most appropriate for measurement of micro figure, step height and roughness of FPD, wafers, hard disks, and other nano-order application. ET4000 series can be selected from a number of models according to applications.
- ET4000A: Multifunctional and automatic
- ET4000L: Fully automatic, compatible with large precision glass or wafer size sample
- ET4000M: Reasonable, high performance and general-use
| Max. sample size | 210 × 210 mm to 300 × 400 mm |
|---|---|
| Repeatability | 1 σ within 0.5 nm |
| Measuring range | Z: 100 μm X: 100 mm (Y stroke: 150 to 400 mm) |
| Resolution | Z: 0.1 nm X: 0.01 μm |
| Measuring force | 0.5 μN to 500 μN |
ET5000
ET5000 can automatically measure large-size samples up to size 880 × 680 mm application with high accuracy. Loading\Unloading sample stage is available an optional.
- Used for fully automatic measurement of large size samples
| Max. sample size | 880 × 680 mm |
|---|---|
| Repeatability | 1 σ 1 nm |
| Measuring range | Z: 100 μm X: 100 mm |
| Resolution | Z: 0.1 nm X: 0.1 μm |
| Measuring force | 0.5 μN to 500 μN |