We would introduce nano-order microfigure measuring instruments with automatically measure micro figures, step height, and roughness with supreme accuracy.

Kosaka Laboratory Ltd.

Microfigure Measuring Instrument  SURFCORDER

Model Lineup

ET200

ET200 is able to trace and analyze nano-level micro figures with high accuracy, appropriate for soften sample surfaces by controlling the measuring force.

Max. sample size φ160 × t 48 mm
Repeatability 1 σ  1 nm or less
Measuring range Z: 600 μm  X: 100 mm
Resolution Z: 0.1 nm  X: 0.1 μm
Measuring force 10 μN to 500 μN
ET4000

Microfigure Measuring Instrument ET4000

Excellent in accuracy, stability and functionality, ET4000 is a fully automatic, most appropriate for measurement of micro figure, step height and roughness of FPD, wafers, hard disks, and other nano-order application. ET4000 series can be selected from a number of models according to applications.

  • ET4000A: Multifunctional and automatic
  • ET4000L: Fully automatic, compatible with large precision glass or wafer size sample
  • ET4000M: Reasonable, high performance and general-use
Max. sample size 210 × 210 mm to 300 × 400 mm
Repeatability 1 σ within 0.5 nm
Measuring range Z: 100 μm  X: 100 mm   (Y stroke: 150 to 400 mm)
Resolution Z: 0.1 nm  X: 0.01 μm
Measuring force 0.5 μN to 500 μN
ET5000

Microfigure Measuring Instrument / ET5000

ET5000 can automatically measure large-size samples up to size 880 × 680 mm application with high accuracy. Loading\Unloading sample stage is available an optional.

  • Used for fully automatic measurement of large size samples
Max. sample size 880 × 680 mm
Repeatability 1 σ  1 nm
Measuring range Z: 100 μm  X: 100 mm
Resolution Z: 0.1 nm  X: 0.1 μm
Measuring force 0.5 μN to 500 μN

Accessory list